Simulation and Experimental Characterization of a 2-d, 3-mhz Capacitive Micromachined Ultrasonic Transducer (cmut) Array Element
نویسندگان
چکیده
AbstmclIn this paper, a 400-pm x 40C-prn, 2-D eapacitive micromachined ultrasonic transducer array element is experimentally characterized, and the results are found to be in agreement with theoretical predictions. As a receiver the transducer has a 1.8 x lo-' n m / m displacement sensitivity, and, as a transmitter, it produces 16.4 kPa/V of output pressure at the transducer surface at 3 MHz. The transducer also has more than 100% fractional bandwidth around 3 MHz, which maker i t suitable for ultrasound imaging. The radiation pattern measurements indicate a 3-dB acceptance angle of * 35 degrees in agreement with the theoretical predictions.
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